Troubleshooting Slow Heat-Up in a Wafer Heater System

https://heater-design-center.pinehavenscope.com/posts/understanding-temperature-control-for-a-kapton-heater

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result