How Cutouts, Edges, and Openings Affect a Wafer Heater Layout

https://flexible-heat-systems.summitquill.com/posts/what-to-consider-when-ordering-a-kapton-heater-for-industrial-use

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result